Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US5899798A · kind A · utility
52Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 1997 |
| Grant date | May 4, 1999 |
| Priority date | — |
| Expiry date | Jul 25, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/047
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A low profile, low hysteresis force feedback gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. A load cell is placed directly above a contact pin of the gimbal system to provide a very accurate feedback measurement of the amount of downward load applied to a substrate during polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.