Scivac
3Patents
0Active
3Granted
28Portfolio score
Filing activity: Jun 11, 1999 → Sep 16, 1999
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6365010B1 | Sputtering apparatus and process for high rate coatings | Electricity | 141 | Expired |
| US6231732A | Cylindrical carriage sputtering system | Electricity | 54 | Expired |
| US6146509A | Inverted field circular magnetron sputtering device | Electricity | 22 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.