Semiconductor Manufacturing
2Patents
0Active
2Granted
23Portfolio score
Filing activity: Feb 25, 1999 → Dec 17, 1999
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6020236A | Method to form capacitance node contacts with improved isolation in a DRAM process | Electricity | 14 | Expired |
| US6245667A | Method of forming via | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.