SKY TECH INC.
45Patents
45Active
45Granted
66Portfolio score
Filing activity: Feb 24, 2020 → Sep 26, 2023
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11739423B2 | Atomic layer deposition apparatus for coating on fine powders | Chemistry; Metallurgy | 5 | Active |
| US11767591B2 | Detachable atomic layer deposition apparatus for powders | Chemistry; Metallurgy | 4 | Active |
| US11532469B1 | Shielding device and thin-film-deposition equipment with the same | Electricity | 4 | Active |
| US11527391B1 | Position-detectable shielding device and thin-film-deposition equipment with the same | Electricity | 3 | Active |
| US11476101B1 | Double-layer shielding device and thin-film-deposition equipment with the same | Electricity | 3 | Active |
| US11482403B1 | Thin-film-deposition equipment for detecting shielding mechanism | Electricity | 3 | Active |
| US11597999B2 | Method and device for decreasing generation of surface oxide of aluminum nitride | Electricity | 1 | Active |
| US11869792B2 | Alignment mechanism and alignment method of bonding machine | Electricity | 1 | Active |
| US11952662B2 | Powder atomic layer deposition equipment with quick release function | Electricity | 1 | Active |
| US11596973B2 | Double-shaft shielding device and thin-film-deposition equipment with the same | Electricity | 1 | Active |
| US11401608B2 | Atomic layer deposition equipment and process method | Electricity | 1 | Active |
| US11427910B2 | Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the same | Chemistry; Metallurgy | 1 | Active |
| US11332826B1 | Atomic layer deposition equipment and process method | Chemistry; Metallurgy | 1 | Active |
| US11898238B2 | Shielding device and thin-film-deposition equipment with the same | Electricity | 1 | Active |
| US11891695B2 | Vibrating deposition device | Chemistry; Metallurgy | 1 | Active |
| US11735456B2 | Alignment mechanism and alignment method of bonding machine | Electricity | 1 | Active |
| US11322380B1 | Substrate transfer system with tray aligner | Electricity | 1 | Active |
| US11476100B1 | Shielding mechanism and substrate-processing chamber with the same | Electricity | 0 | Active |
| US12123092B2 | Powder-atomic-layer-deposition device with knocker | Electricity | 0 | Active |
| US11987883B2 | Powder atomic layer deposition apparatus for blowing powders | Chemistry; Metallurgy | 0 | Active |
| US11891694B2 | Atomic-layer-deposition equipment and atomiclayer-deposition method by using the same | Electricity | 0 | Active |
| US11961753B2 | Substrate-bonding device | Electricity | 0 | Active |
| US11535938B2 | Shower head assembly and atomic layer deposition device | Chemistry; Metallurgy | 0 | Active |
| US11652190B2 | Semiconductor component with oxidized aluminum nitride film and manufacturing method thereof | Electricity | 0 | Active |
| US11598006B2 | Wafer support and thin-film deposition apparatus using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.