Sortec Corporation
5Patents
0Active
5Granted
24Portfolio score
Filing activity: Apr 19, 1991 → Feb 10, 1994
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5182610A | Position detecting method and device therefor as well as aligning device | Physics | 77 | Expired |
| US5326672A | Resist patterns and method of forming resist patterns | Physics | 25 | Expired |
| US5374502A | Resist patterns and method of forming resist patterns | Physics | 21 | Expired |
| US5325414A | X-ray mask alignment method and apparatus therefor as well as X-ray mask to be used to said method and said apparatus | Physics | 8 | Expired |
| US5434648A | Proximity exposure method and machine therefor | Physics | 6 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.