Treatment apparatus
US5728276A · kind A · utility
38Cited by
7References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 1995 |
| Grant date | Mar 17, 1998 |
| Priority date | — |
| Expiry date | Aug 21, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/34
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a treatment apparatus, a collimator is insulated electrically from the other equipment to be rendered electrically floating, and also the potential of the collimator is variably controllable by a variable DC power source. Therefore, the thickness in plane of the layer to be produced can be uniformalized by controlling the voltage applied to the collimator, without changing both layout and figure of the hardware, e.g., permanent magnet, without process, and further without both beginning and end of a target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.