Akira Koguchi
4Patents
4h-index
7Co-inventors
36Inventor score
Filing activity: Jan 15, 1998 → Aug 24, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6009890A | Substrate transporting and processing system | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6612801B1 | Method and device for arraying substrates and processing apparatus thereof | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6269552A | Method of drying substrates and drying apparatus | Electricity | 23 | Expired |
| US6821073B1 | Container handling system for substrate processing apparatus and method of handling containers | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.