Akito Hatano
13Patents
3h-index
13Co-inventors
49Inventor score
Filing activity: Jun 18, 2013 → Apr 30, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9810532B2 | Substrate treating apparatus and substrate treating methods | Electricity | 5 | Active |
| US11075095B2 | Substrate processing apparatus | Electricity | 5 | Active |
| US10115588B2 | Substrate treating apparatus and substrate treating method | Performing Operations; Transporting | 4 | Active |
| US9576831B2 | Substrate container, a load port apparatus, and a substrate treating apparatus | Electricity | 3 | Active |
| US10332761B2 | Substrate processing apparatus | Electricity | 3 | Active |
| US10910247B2 | Substrate container, load port apparatus, and substrate treating apparatus | Electricity | 2 | Active |
| US11410863B2 | Substrate processing device including heater between substrate and spin base | Electricity | 1 | Active |
| US10381249B2 | Substrate container, load port apparatus, and substrate treating apparatus | Performing Operations; Transporting | 0 | Active |
| US10297476B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US9449861B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11610790B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US10748795B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US10403517B2 | Substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.