Akitoshi Kawai
11Patents
2h-index
11Co-inventors
51Inventor score
Filing activity: Jun 1, 1999 → Sep 12, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6405610B1 | Wafer inspection apparatus | Electricity | 11 | Expired |
| US10557706B2 | Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program | Physics | 3 | Active |
| US10760902B2 | Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program | Physics | 2 | Active |
| US11016038B2 | Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure | Physics | 1 | Active |
| US8730465B2 | Polarized light defect detection in pupil images | Physics | 1 | Active |
| US8599370B2 | Polarized light defect detection in pupil images | General | 0 | Revoked |
| US10481106B2 | Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method | Physics | 0 | Active |
| US10444165B2 | Measurement processing device, X-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method | General | 0 | Revoked |
| US10809209B2 | Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method | Physics | 0 | Active |
| US11016039B2 | Measurement processing device, measurement processing method, measurement processing program, and method for manufacturing structure | Physics | 0 | Active |
| US10502562B2 | Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.