Measurement processing device, x-ray inspection device, measurement processing method, measurement processing program, and structure manufacturing method
US10809209B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Sep 12, 2019 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Sep 12, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30108
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement processing device used for an X-ray inspection device includes: a region information acquisition unit that acquires first region information based on X-rays passing through a first region that is a part of a first specimen; a storage unit that stores second region information related to a second region of a second specimen, the second region being larger than the first region; and a determination unit that determines whether or not a region corresponding to the first region is included in the second region, based on the first region information and the second region information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.