Akshay V. Shah
3Patents
2h-index
8Co-inventors
30Inventor score
Filing activity: Dec 28, 1992 → Mar 28, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5298117A | Etching of copper-containing devices | Electricity | 16 | Expired |
| US5326671A | Method of making circuit devices comprising a dielectric layer of siloxane-caprolactone | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5620558A | Etching of copper-containing devices | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.