Inventor · Berkeley Heights, NJ, US

Alan D. White

11Patents
10h-index
13Co-inventors
65Inventor score

Filing activity: Mar 7, 1975 → Jan 5, 1994

Most-cited inventions

PatentTitleAreaCited byStatus
US4326805A Method and apparatus for aligning mask and wafer members Physics 89 Expired
US4037969A Zone plate alignment marks Electricity 76 Expired
US5353322A Lens system for X-ray projection lithography camera Physics 74 Expired
US5220590A X-ray projection lithography camera Physics 59 Expired
US5428906A Sludge treatment system Emerging Cross-Sectional Technologies 41 Expired
US5279637A Sludge treatment system Emerging Cross-Sectional Technologies 35 Expired
US4171870A Compact image projection apparatus Physics 32 Expired
US4398824A Wafer tilt compensation in zone plate alignment system Physics 28 Expired
US4302079A Photolithographic projection apparatus using light in the far ultraviolet Physics 18 Expired
US3990798A Method and apparatus for aligning mask and wafer Physics 16 Expired
US4631727A Cold cathode gas tubes Electricity 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.