Andrej Mitrovic
3Patents
3h-index
3Co-inventors
39Inventor score
Filing activity: Aug 13, 2003 → May 5, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7230204B2 | Method and system for temperature control of a substrate | Electricity | 44 | Expired |
| US8173980B2 | Gas cluster ion beam system with cleaning apparatus | Electricity | 3 | Active |
| US7017652B2 | Method and apparatus for transferring heat from a substrate to a chuck | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.