Ann Erickson
2Patents
0h-index
3Co-inventors
24Inventor score
Filing activity: Mar 4, 2020 → Aug 4, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12227840B2 | Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating | Electricity | 0 | Active |
| US12131890B2 | Chuck for plasma processing chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.