Inventor · Hwaseong-si, KR

Ansook Sul

3Patents
0h-index
10Co-inventors
28Inventor score

Filing activity: Apr 25, 2021 → Dec 15, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US12119240B2 Substrate drying device and method of drying substrate using the same preliminary class Electricity 0 Active
US12211711B2 Baking apparatus Electricity 0 Active
US11590460B2 Chemical solution evaporation device and substrate processing device including the same Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.