Aurélien Fay
2Patents
0h-index
4Co-inventors
24Inventor score
Filing activity: Jun 2, 2015 → Jun 26, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10423074B2 | Method for calculating the metrics of an IC manufacturing process | Emerging Cross-Sectional Technologies | 0 | Active |
| US10573492B2 | Calibration of elementary small patterns in variable-shaped-beam electron-beam lithography | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.