Axel Feicke
2Patents
1h-index
4Co-inventors
27Inventor score
Filing activity: Nov 17, 2006 → Oct 25, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7820343B2 | Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate | Physics | 1 | Active |
| US7811727B2 | Method for determining an exposure dose and exposure apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.