Bakul Patel
5Patents
5h-index
11Co-inventors
52Inventor score
Filing activity: Jul 16, 1999 → Jun 12, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6235693A | Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices | Chemistry; Metallurgy | 49 | Expired |
| US6777380B2 | Compositions for cleaning organic and plasma etched residues for semiconductor devices | Electricity | 26 | Expired |
| US7144848B2 | Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removal | Chemistry; Metallurgy | 20 | Expired |
| US7456140B2 | Compositions for cleaning organic and plasma etched residues for semiconductor devices | Electricity | 17 | Expired |
| US7273060B2 | Methods for chemically treating a substrate using foam technology | Chemistry; Metallurgy | 8 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.