Inventor · Azmoos, CH

Bart Scholte van Mast

6Patents
2h-index
5Co-inventors
40Inventor score

Filing activity: Jun 9, 2000 → Jul 18, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US6291940A Blanker array for a multipixel electron source Electricity 21 Expired
US8574409B2 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Electricity 14 Active
US7706908B2 Method for positioning a wafer Electricity 2 Active
US8246794B2 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Electricity 1 Active
US8491252B2 Transport method for disk-shaped workpieces Electricity 0 Active
US7067399B2 Method and apparatus for removal of surface contaminants from substrates in vacuum applications Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.