Inventor · Copthorne, GB

Bernard Harrison

15Patents
10h-index
27Co-inventors
72Inventor score

Filing activity: Sep 9, 1985 → May 4, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5886355A Ion implantation apparatus having increased source lifetime Electricity 55 Expired
US5262652A Ion implantation apparatus having increased source lifetime Electricity 52 Expired
US4743767A Systems and methods for ion implantation Electricity 49 Expired
US6559454B1 Ion beam generation apparatus Electricity 35 Expired
US4754200A Systems and methods for ion source control in ion implanters Electricity 33 Expired
US5554852A Ion implantation having increased source lifetime Electricity 22 Expired
US5517077A Ion implantation having increased source lifetime Electricity 20 Expired
US5747936A Ion implantation apparatus with improved post mass selection deceleration Electricity 15 Expired
US6608316B1 Ion implantation beam monitor Electricity 12 Expired
US6908836B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 12 Expired
US6956223B2 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor Electricity 9 Expired
US7049210B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 6 Expired
US7282427B1 Method of implanting a substrate and an ion implanter for performing the method Electricity 4 Expired
US7253424B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 3 Expired
US7235797B2 Method of implanting a substrate and an ion implanter for performing the method Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.