Björn Liebaug
2Patents
0h-index
5Co-inventors
24Inventor score
Filing activity: Aug 20, 2019 → Sep 14, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10831114B2 | Lithography apparatus and method | Physics | 0 | Active |
| US11448968B2 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.