Brent Vopat
2Patents
1h-index
4Co-inventors
37Inventor score
Filing activity: Jul 13, 2002 → Jul 18, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8796589B2 | Processing system with the dual end-effector handling | Emerging Cross-Sectional Technologies | 7 | Active |
| US10665476B2 | Substrate processing system, valve assembly, and processing method | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.