Brett M. Herzig
4Patents
2h-index
11Co-inventors
34Inventor score
Filing activity: Sep 4, 2018 → Mar 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10796940B2 | Enhanced automatic wafer centering system and techniques for same | Electricity | 4 | Active |
| US10991550B2 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Electricity | 4 | Active |
| US11581214B2 | Enhanced automatic wafer centering system and techniques for same | Electricity | 2 | Active |
| US11594397B2 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.