Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US11594397B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2021 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | May 22, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tuning circuit including a variable LF/MF capacitor coupled in series with an LF/MF inductor. The LF/MF tuning circuit is coupled between ground and a common node configured to receive an RF input. The circuit includes a high frequency (HF) tuning circuit coupled in parallel to the LF/MF tuning circuit between ground and the common node. The HF tuning circuit includes a variable HF capacitor coupled in series with an HF inductor. Cross parallel isolation occurs between the LF/MF inductor of the LF/MF tuning circuit and the HF inductor of the HF tuning circuit when adjusting the variable LF/MF capacitor or variable HF capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.