Inventor · Poughquag, NY, US

Brian Herbst

6Patents
6h-index
26Co-inventors
55Inventor score

Filing activity: Jul 27, 1994 → Dec 12, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6207787A Antireflective coating for microlithography Chemistry; Metallurgy 41 Expired
US5607824A Antireflective coating for microlithography Chemistry; Metallurgy 36 Expired
US5736301A Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used Chemistry; Metallurgy 13 Expired
US6489857B2 Multiposition micro electromechanical switch Electricity 11 Expired
US6831363B2 Structure and method for reducing thermo-mechanical stress in stacked vias Electricity 9 Expired
US6657305B1 Semiconductor recessed mask interconnect technology Electricity 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.