Brian Herbst
6Patents
6h-index
26Co-inventors
55Inventor score
Filing activity: Jul 27, 1994 → Dec 12, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6207787A | Antireflective coating for microlithography | Chemistry; Metallurgy | 41 | Expired |
| US5607824A | Antireflective coating for microlithography | Chemistry; Metallurgy | 36 | Expired |
| US5736301A | Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used | Chemistry; Metallurgy | 13 | Expired |
| US6489857B2 | Multiposition micro electromechanical switch | Electricity | 11 | Expired |
| US6831363B2 | Structure and method for reducing thermo-mechanical stress in stacked vias | Electricity | 9 | Expired |
| US6657305B1 | Semiconductor recessed mask interconnect technology | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.