Bruno Morel
10Patents
4h-index
23Co-inventors
56Inventor score
Filing activity: Aug 11, 2000 → Apr 30, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7052553B1 | Wet cleaning of electrostatic chucks | Electricity | 153 | Expired |
| US6433484B1 | Wafer area pressure control | Electricity | 22 | Expired |
| US8313635B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 6 | Active |
| US7811409B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 4 | Active |
| US6490536B1 | Integrated load simulator | Electricity | 4 | Expired |
| US6937915B1 | Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Performing Operations; Transporting | 3 | Expired |
| US7672907B2 | Postage meter having a vertical path | Physics | 3 | Active |
| US6925348B2 | Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Performing Operations; Transporting | 2 | Expired |
| US10979307B2 | Synchronized distributed processing in a communications network | Electricity | 2 | Active |
| US8859432B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.