Wet cleaning of electrostatic chucks
US7052553B1 · kind B1 · utility
153Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Dec 7, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6704
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A non-destructive and simple method for cleaning a new or used electrostatic chuck comprises a wet cleaning process, which removes contaminants deposited on a surface of the electrostatic chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.