Chalykh Roman
3Patents
2h-index
8Co-inventors
30Inventor score
Filing activity: Mar 8, 2013 → Jun 16, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9087698B2 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Electricity | 5 | Active |
| US9466490B2 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Electricity | 3 | Active |
| US9176375B2 | Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.