Charles Chen
10Patents
5h-index
11Co-inventors
59Inventor score
Filing activity: Feb 4, 2003 → Oct 22, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8010222B2 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Performing Operations; Transporting | 18 | Active |
| US6866559B2 | Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad | Performing Operations; Transporting | 17 | Expired |
| US6884146B2 | Systems and methods for characterizing a polishing process | Performing Operations; Transporting | 11 | Expired |
| US6935922B2 | Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing | Performing Operations; Transporting | 7 | Expired |
| US7030018B2 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Performing Operations; Transporting | 6 | Expired |
| US7332438B2 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Performing Operations; Transporting | 5 | Expired |
| US7175503B2 | Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device | Performing Operations; Transporting | 5 | Expired |
| US7052369B2 | Methods and systems for detecting a presence of blobs on a specimen during a polishing process | Performing Operations; Transporting | 5 | Expired |
| US9563972B2 | Methods and apparatus for providing color palette management within a graphical user interface | Physics | 2 | Active |
| US8831767B2 | Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool | Performing Operations; Transporting | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.