Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad

US6866559B2 · kind B2 · utility

Assignee

• KLA-Tencor Technologies Corp. · US

Inventors

• Kurt Lehman · Menlo Park, US
• Charles Chen · Sunnyvale, US
• Ronald L. Allen · San Jose, US
• Robert Shinagawa · Cupertino, US
• Anantha R. Sethuraman · Palo Alto, US
• Christopher F. Bevis · Los Gatos, US
• Thanassis Trikas · Redwood City, US
• Haiguang Chen · Millbrae, US
• Ching-Ling Meng · Fremont, US

Key dates

• Filing date: Feb 4, 2003
• Grant date: Mar 15, 2005
• Expiry date: Feb 19, 2023

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B24B49/12
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad are provided. One window includes a first portion and a second portion. The first portion includes a first material, and the second portion includes a second material different than the first. Another window includes a substantially transparent gel. In some instances, the gel includes a triblock copolymer and a plasticizing oil. An additional window includes an upper window, a housing, and a diaphragm. The housing may allow a fluid to flow into and out of a space between the housing and the diaphragm. In another embodiment, a window includes a layer of material coupled to lateral surfaces of the window. In some cases, the window may be disposed within an opening in a polishing pad, and movement of the window within the polishing pad may compress the layer of material.