Charles Thomas Larson
8Patents
2h-index
6Co-inventors
36Inventor score
Filing activity: Jun 19, 2015 → Jun 19, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10082390B2 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Physics | 2 | Active |
| US10648802B2 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Physics | 2 | Active |
| US11029148B2 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Physics | 1 | Active |
| US12158437B2 | XPS metrology for process control in selective deposition | Electricity | 0 | Active |
| US11346795B2 | XPS metrology for process control in selective deposition | Electricity | 0 | Active |
| US10801978B2 | XPS metrology for process control in selective deposition | Electricity | 0 | Active |
| US11680915B2 | XPS metrology for process control in selective deposition | Electricity | 0 | Active |
| US11733035B2 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.