Cheolmin Shin
2Patents
0h-index
9Co-inventors
21Inventor score
Filing activity: Oct 18, 2022 → Jan 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12428581B2 | Chemical mechanical polishing slurry composition for polishing boron silicon compound, chemical mechanical polishing method and method of fabricating semiconductor device using the same | Electricity | 0 | Active |
| US12122702B2 | Ultrapure water supply apparatus, substrate processing system including the same, and substrate processing method using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.