Chi-Hung Wei
4Patents
3h-index
2Co-inventors
36Inventor score
Filing activity: Nov 13, 1998 → Jul 27, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5950093A | Method for aligning shallow trench isolation | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6074950A | Alignment strategy for asymmetrical alignment marks | Electricity | 11 | Expired |
| US7413848B2 | Method of removing photoresist and photoresist rework method | Physics | 3 | Active |
| US6049383A | Aligner detector including an electrooptic modulator for each diffraction order | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.