Inventor · Zhubeikou, TW

Chia-Ho Chen

16Patents
3h-index
23Co-inventors
60Inventor score

Filing activity: Oct 10, 1989 → Nov 28, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US4971200A Packaging system for string lights Performing Operations; Transporting 20 Expired
US8896136B2 Alignment mark and method of formation Electricity 9 Active
US9234278B2 CVD conformal vacuum/pumping guiding design Chemistry; Metallurgy 3 Active
US9741575B2 CVD apparatus with gas delivery ring Mechanical Engineering; Lighting; Heating 3 Active
US9543125B2 Directing plasma distribution in plasma-enhanced chemical vapor deposition Electricity 2 Active
US8902561B2 Electrostatic chuck with multi-zone control Electricity 2 Active
US9490209B2 Electro-migration barrier for Cu interconnect Electricity 2 Active
US9478480B2 Alignment mark and method of formation Electricity 2 Active
US9218998B2 Electrostatic chuck with multi-zone control Electricity 1 Active
US8884526B2 Coherent multiple side electromagnets Electricity 1 Active
US10163795B2 Electro-migration barrier for Cu interconnect Electricity 0 Active
US11923304B2 Electro-migration barrier for interconnect Electricity 0 Active
US8916480B2 Chemical vapor deposition film profile uniformity control Chemistry; Metallurgy 0 Active
US10867920B2 Electro-migration barrier for Cu interconnect Electricity 0 Active
US9287154B2 UV curing system for semiconductors Electricity 0 Active
US11515255B2 Electro-migration barrier for interconnect Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.