Chia-Wei Lu
3Patents
1h-index
2Co-inventors
30Inventor score
Filing activity: Jan 29, 2016 → Jun 24, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10763140B2 | Semiconductor processing station | Electricity | 1 | Active |
| US11462425B2 | Semiconductor processing station | Electricity | 0 | Active |
| US10103042B2 | Chamber, semiconductor processing station, and semiconductor process using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.