Inventor · Campbell, CA, US

Chris Maher

9Patents
4h-index
37Co-inventors
53Inventor score

Filing activity: Sep 21, 2007 → Oct 15, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8126255B2 Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions Physics 146 Active
US8073240B2 Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer Physics 24 Active
US8135204B1 Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe Physics 20 Active
US8000922B2 Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm Physics 11 Active
US10832396B2 And noise based care areas Physics 4 Active
US8537349B2 Monitoring of time-varying defect classification performance Emerging Cross-Sectional Technologies 4 Active
US10604433B2 Emancipative waste activated sludge stripping to remove internal phosphorus (“eWASSTRIP”) Chemistry; Metallurgy 1 Active
US9489599B2 Decision tree construction for automatic classification of defects on semiconductor wafers Physics 0 Active
US11114324B2 Defect candidate generation for inspection Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.