Decision tree construction for automatic classification of defects on semiconductor wafers
US9489599B2 · kind B2 · utility
0Cited by
6References
33Claims
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Key dates
| Filing date | Apr 21, 2014 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Apr 21, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/0004
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.