Clinton Haris
7Patents
3h-index
8Co-inventors
42Inventor score
Filing activity: May 19, 2000 → Jun 28, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6663340B1 | Wafer carrier transport system for tool bays | Emerging Cross-Sectional Technologies | 15 | Expired |
| US8292563B2 | Nonproductive wafer buffer module for substrate processing apparatus | Electricity | 14 | Active |
| US6389707B1 | Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method | Electricity | 7 | Expired |
| US6426698B1 | Lot signalling device | Physics | 1 | Expired |
| US6468017B1 | Vehicle, system and method for loading and unloading | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6732855B1 | Conveying element and conveyor means for conveying wafer receptacles, and method | Performing Operations; Transporting | 1 | Expired |
| US9099506B2 | Transfer chamber between workstations | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.