Inventor · Lunenburg, MA, US

Clinton Haris

7Patents
3h-index
8Co-inventors
42Inventor score

Filing activity: May 19, 2000 → Jun 28, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US6663340B1 Wafer carrier transport system for tool bays Emerging Cross-Sectional Technologies 15 Expired
US8292563B2 Nonproductive wafer buffer module for substrate processing apparatus Electricity 14 Active
US6389707B1 Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method Electricity 7 Expired
US6426698B1 Lot signalling device Physics 1 Expired
US6468017B1 Vehicle, system and method for loading and unloading Emerging Cross-Sectional Technologies 1 Expired
US6732855B1 Conveying element and conveyor means for conveying wafer receptacles, and method Performing Operations; Transporting 1 Expired
US9099506B2 Transfer chamber between workstations Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.