Transfer chamber between workstations
US9099506B2 · kind B2 · utility
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13References
13Claims
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Key dates
| Filing date | Mar 30, 2005 |
| Grant date | Aug 4, 2015 |
| Priority date | — |
| Expiry date | Feb 15, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A bridging chamber is constructed between adjacent substrate processing workstation systems and connected by ports constructed in the adjacent substrate processing workstation systems. Transport mechanisms are used to move the substrates into and out of the bridging chamber to bypass primary transport systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.