Cristina Cheung
2Patents
2h-index
7Co-inventors
27Inventor score
Filing activity: Jun 13, 2001 → Jun 28, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6597463B1 | System to determine suitability of sion arc surface for DUV resist patterning | Physics | 18 | Expired |
| US6630361B1 | Use of scatterometry for in-situ control of gaseous phase chemical trim process | Electricity | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.