Inventor · Lexington, MA, US

Daniel Greenberg

9Patents
3h-index
10Co-inventors
46Inventor score

Filing activity: May 22, 2014 → Aug 14, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9425076B2 Substrate transfer robot end effector Electricity 9 Active
US9925999B2 Power assist wagon Performing Operations; Transporting 7 Active
US9026244B1 Presence sensing and position correction for wafer on a carrier ring Emerging Cross-Sectional Technologies 7 Active
US11787472B2 Powered ride-on vehicle Emerging Cross-Sectional Technologies 3 Active
US10525998B2 Power assist wagon Performing Operations; Transporting 3 Active
US10394233B2 Dual-controlled ride-on vehicle Emerging Cross-Sectional Technologies 2 Active
US9202738B2 Pneumatic end effector apparatus and substrate transportation systems with annular flow channel Electricity 2 Active
US10245520B2 Powered ride-on vehicle Emerging Cross-Sectional Technologies 1 Active
US9446522B2 Presence sensing and position correction for wafer on a carrier ring Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.