Pneumatic end effector apparatus and substrate transportation systems with annular flow channel
US9202738B2 · kind B2 · utility
2Cited by
14References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2014 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Sep 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Systems, apparatus and methods including pneumatic end effectors for transporting substrates between system components of electronic device manufacturing systems are provided. In one aspect, an end effector has a base adapted to be connected to a robotic component, and one or more pneumatic suction elements positioned on the base. Applying a pneumatic source to the pneumatic suction element draws a substrate into contact with contact pads of the end effector. Methods and systems, as well as numerous other aspects are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.