Presence sensing and position correction for wafer on a carrier ring
US9026244B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2014 |
| Grant date | May 5, 2015 |
| Priority date | — |
| Expiry date | May 22, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S901/47
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Embodiments of the invention include apparatuses and systems for determining the position of a carrier ring assembly supported by an end effector. In an embodiment, the position of the carrier ring assembly is determined by passing the carrier ring assembly through a plurality of through beam sensors. As the carrier ring passes through the sensors, a plurality of sensor transitions along points on the carrier ring assembly are detected. Each sensor transition indicates that one of the through beam sensors changed from an unblocked state to a blocked state, or changed from an blocked state to an unblocked state. The position of the end effector is recorded at each sensor transition and is associated with the sensor transition that caused the end effector position to be recorded. A position of the carrier ring assembly is then calculated from the plurality of sensor transitions and their associated end effector positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.