Inventor · Fremont, CA, US

Dave Trussell

6Patents
6h-index
14Co-inventors
52Inventor score

Filing activity: Feb 14, 2002 → Jan 29, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US6744212B2 Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions Electricity 63 Expired
US7683289B2 Apparatus and method for controlling plasma density profile Electricity 27 Active
US7405521B2 Multiple frequency plasma processor method and apparatus Electricity 24 Expired
US8674255B1 Apparatus and method for controlling etch uniformity Performing Operations; Transporting 13 Active
US8299390B2 Apparatus and method for controlling plasma density profile Electricity 12 Active
US7276135B2 Vacuum plasma processor including control in response to DC bias voltage Electricity 11 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.