Inventor · Rockville, MD, US

David Ferris

4Patents
3h-index
11Co-inventors
40Inventor score

Filing activity: Nov 1, 2001 → Sep 1, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US7163587B2 Reactor assembly and processing method Chemistry; Metallurgy 24 Expired
US8580076B2 Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith Emerging Cross-Sectional Technologies 10 Active
US7449416B2 Apparatus and plasma ashing process for increasing photoresist removal rate Electricity 6 Expired
US6897615B2 Plasma process and apparatus Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.