Inventor · Daly City, CA, US

David K. Lam

34Patents
10h-index
31Co-inventors
75Inventor score

Filing activity: Nov 3, 2000 → Jun 6, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9478395B1 Alignment and registration targets for multiple-column charged particle beam lithography and inspection Electricity 18 Active
US9595419B1 Alignment and registration targets for multiple-column charged particle beam lithography and inspection Electricity 15 Active
US9466463B1 Charged particle beam substrate inspection using both vector and raster scanning Electricity 15 Active
US9556521B1 Precision deposition using miniature-column charged particle beam arrays Electricity 13 Active
US9620332B1 Charged particle beam substrate inspection using both vector and raster scanning Electricity 12 Active
US9207539B1 Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems Electricity 12 Active
US8999627B1 Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp Electricity 11 Active
US10026589B1 Alignment and registration targets for charged particle beam substrate patterning and inspection Electricity 11 Active
US9466464B1 Precision substrate material removal using miniature-column charged particle beam arrays Electricity 11 Active
US9673114B1 Precision substrate material removal using miniature-column charged particle beam arrays Electricity 10 Active
US9184027B1 Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp Electricity 10 Active
US8999628B1 Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems Electricity 10 Active
US9453281B1 Precision deposition using miniature-column charged particle beam arrays Electricity 10 Active
US10020200B1 Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays Electricity 9 Active
US9824859B1 Precision material modification using miniature-column charged particle beam arrays Electricity 8 Active
US9210053B2 System and method for management of network monitoring information Electricity 7 Active
US9881817B1 Precision substrate material multi-processing using miniature-column charged particle beam arrays Electricity 7 Active
US10523433B1 Secure intra-chip hardware micro-segmentation using charged particle beam processing Electricity 6 Active
US10312091B1 Secure permanent integrated circuit personalization Electricity 6 Active
US10341108B1 Secure permanent integrated circuit personalization Electricity 5 Active
US10020166B1 Alignment and registration targets for charged particle beam substrate patterning and inspection Electricity 4 Active
US9822443B1 Precision material modification using miniature-column charged particle beam arrays Electricity 4 Active
US6804310B1 Decision feedback loop apparatus and method for channel estimation and de-rotation using burst pilot bits Electricity 2 Expired
US11550459B2 User interfaces for maps and navigation Physics 1 Active
US10978303B1 Secure permanent integrated circuit personalization Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.