David V. Adams
11Patents
9h-index
31Co-inventors
72Inventor score
Filing activity: Apr 18, 1989 → Jul 27, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5194401A | Thermally processing semiconductor wafers at non-ambient pressures | Chemistry; Metallurgy | 541 | Expired |
| US4920918A | Pressure-resistant thermal reactor system for semiconductor processing | Chemistry; Metallurgy | 376 | Expired |
| US5108792A | Double-dome reactor for semiconductor processing | Chemistry; Metallurgy | 149 | Expired |
| US6468021B1 | Integrated intra-bay transfer, storage, and delivery system | Electricity | 73 | Expired |
| US5085887A | Wafer reactor vessel window with pressure-thermal compensation | Chemistry; Metallurgy | 55 | Expired |
| US5640007A | Optical encoder comprising a plurality of encoder wheels | Physics | 43 | Expired |
| US5479929A | Drive system with a multiturn rotary stop | Human Necessities | 33 | Expired |
| US6031439A | Bi-directional hall-effect control device | Human Necessities | 17 | Expired |
| US5719559A | System and method for the verification of a digital control system | Physics | 11 | Expired |
| US11877818B2 | Integration of robotic arms with surgical probes | Human Necessities | 1 | Active |
| US10163667B2 | Linear wafer drive for handling wafers during semiconductor fabrication | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.