Wafer reactor vessel window with pressure-thermal compensation
US5085887A · kind A · utility
55Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 1990 |
| Grant date | Feb 4, 1992 |
| Priority date | — |
| Expiry date | Sep 7, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A quartz window for a wafer reactor vessel has a flat bow for withstanding the pressure differential between the ambient outside pressure and the reduced pressure in the wafer chamber. The bow is enhanced at elevated operating temperatures to compensate for the flattening effect of higher pressure differentials. The enhanced bowing is provided by a rigid peripheral flange which radially confines the window. The thermal expansion within the window is not expressed radially, but is directed outward to increase the bow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.