Deok Su HAN
3Patents
1h-index
6Co-inventors
37Inventor score
Filing activity: Dec 16, 2011 → May 1, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8840798B2 | Chemical mechanical polishing slurry composition and method for producing semiconductor device using the same | Chemistry; Metallurgy | 9 | Active |
| US12110421B2 | Composition for semiconductor processing and method of fabricating semiconductor device using the same | Electricity | 0 | Active |
| US12116503B2 | Polishing composition for semiconductor process and method for manufacturing semiconductor device by using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.