Dmitry Opaits
5Patents
1h-index
17Co-inventors
37Inventor score
Filing activity: Oct 20, 2015 → Oct 5, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10132290B2 | Apparatus and method for aerodynamic performance enhancement of a wind turbine | Emerging Cross-Sectional Technologies | 2 | Active |
| US9752981B2 | Apparatus with a spectral reflectometer for processing substrates | Physics | 1 | Active |
| US10312121B2 | Systems and methods for aligning measurement device in substrate processing systems | Electricity | 1 | Active |
| US10224187B1 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Electricity | 0 | Active |
| US11791189B2 | Reflectometer to monitor substrate movement | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.